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... a zirconium and/or hafniumcontaining layer on a ... "Atomic layer deposition" ... Lanthanide oxide/zirconium oxide atomic layer deposited nanolaminate ...
... "ALD Metal Oxide Deposition Process Using Direct ... ALD metal oxide deposition process using direct oxidation: ... atomic layer deposition of hafnium ...
The zirconium silicon oxide film may be formed by atomic layer deposition. ... including an insulating layer having a zirconium ... forming zirconium and/or hafnium ...
... Atomic Layer Deposition of Conductive Hafnium Nitride Using Tetrakis(ethylmethylamino)hafnium for ... Hafnium Nitride Using Tetrakis(ethylmethylamino.
A dielectric layer containing an atomic layer deposited insulating metal oxide film having multiple ... Genus, Inc. Vertically ... Atomic layer deposition of ...
... a zirconium and/or hafniumcontaining layer on ... the formation of the insulating layer formation by a deposition process ... "Atomic layer deposition ...
Atomic layer deposited HfSiON dielectric films wherein each ... Atomic layer deposited zirconium ... oxide and hafnium oxide using atomic layer deposition:
... selfsaturating atomic layer deposition ... Plasma pretreating surfaces for atomic layer deposition ... ZrO 2, hafnium and zirconium silicates, ...
... layers provide an insulating layer in a variety of ... to deposit hafnium by atomic layer deposition. ... zirconium oxide atomic layer deposited ...
... such insulating layer may be advantageously used as a passivation layer in ... and an insulating layer deposited on the substrate by Atomic Layer Deposition ...
In some embodiments aluminum fluoride thin films are deposited by ... comprises hafnium or zirconium. ... for atomic layer deposition of hafnium ...
Atomic layer deposition of metal oxynitride layers as gate dielectrics and ... Atomic layer deposition of hafnium ... Atomic layer deposited zirconium ...
... wherein forming a layer of zirconium oxide includes forming a layer of zirconium oxide by atomic layer deposition. ... Genus, Inc: Radical ... a hafniumbased ...
An atomic layer deposited ZrAlxOy dielectric ... Zirconium and/or hafnium ... "Atomic layer Deposition of Zirconium Titanium Oxide from Titanium ...
... titanium and zirconium by atomic layer deposition includes ... in insulating layer: ... Deposition of hafnium oxide and/or zirconium oxide and ...
... comprising depositing a hafnium compound by atomic layer deposition to ... Zirconium and/or hafnium ... Method for forming gate insulating layer having ...
Forming a layer of hafnium oxide by atomic layer deposition and forming a ... in which a insulating layer is ... "Atomic Layer Deposition of ZirconiumDoped ...
A capacitor structure is formed over a semiconductor substrate by atomic layer deposition ... insulating layer though an atomic ... hafnium oxide and zirconium ...
Atomic layer deposited dielectric layers containing a lanthanum hafnium oxide layer and methods of fabricating such dielectric layers provide an insulating layer in a ...
The metal oxynitride layer is formed from zirconium oxynitride, hafnium ... A metal oxynitride layer formed by atomic layer deposition of a plurality of ...
The use of atomic layer deposition ... Forming the dielectric structure includes depositing zirconium oxide using atomic layer deposition using precursor ...
Methods of using atomic layer deposition to deposit a high ... Atomic layer deposition of hafnium ... Lanthanide oxide/zirconium oxide atomic layer deposited ...
... a zirconium and/or hafniumcontaining layer on ... nitrogendoped polysilicon), a metallic layer 60, insulating ... Atomic layer deposition of zirconiumdoped ...
Atomic layer deposited dielectric layers ... a lanthanum hafnium oxide layer is formed by depositing hafnium and lanthanum by atomic layer deposition onto a ...
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